SEMI E63 - Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface -

Abstract

This Standard specifies the tool side of the mechanical interface between the main part of a process or metrology tool and the component that opens boxes and presents the boxes to the tool wafer handler for unloading and loading 300 mm wafers. The box opener/loader unit would include one or more load ports (that would conform to SEMI E15.1) as well as storage capacity for empty boxes or waiting lots (if needed by the tool throughput). The box opener/loader unit might not only be configured to handle boxes (that would conform to SEMI E47.1 and SEMI E62) but also to open cassettes (that would conform to SEMI E1.9). This Standard defines one interface for all such carriers and for any carrier capacity (13 and 25 wafers).

This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the mechanical interface is specified; no materials requirements or micro-contamination limits are given.

The interface specified in this Standard is designed for a tool with a sealed minienvironment, but it could also just be a well-defined automation interface.

This interface is not intended to provide high repeatability or rapid removal (both of which can be provided by other couplings in the box opener/loader unit).

This Specification also does not apply when load ports are stacked one on top of the other.

This Specification does not apply when inserting open cassettes into load-lock chambers directly.

Referenced SEMI Standards (Purchase separately)
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E19 — Specification for Standard Mechanical Interface (SMIF)
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E57 — Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

Revision History
SEMI E63-0223 (technical revision)
SEMI E63-0616 (technical revision)
SEMI E63-1104 (technical revision)
SEMI E63-0600AE (editorial revision)
SEMI E63-0600A (technical revision)
SEMI E63-0600 (technical revision)
SEMI E63-0200 (technical revision)
SEMI E63-0999 (technical revision)
SEMI E63-0699 (technical revision)
SEMI E63-0298 (technical revision)
SEMI E63-0997 (first published)

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