SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port -
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Specification defines a standard location on SEMI E15.1-compliant tools and requirements to be used for installing a docking interface for carrier transport carts. It is intended to promote a consistent interface location between carrier transport carts and SEMI E15.1-compliant wafer process or inspection equipment.
This Standard covers 300 mm SEMI E15.1-compliant tools only. Similar requirements for other tools are not defined here.
Referenced SEMI Standards (purchase separately)
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E64-1105 (Reapproved 0512)
SEMI E64-1105 (technical revision)
SEMI E64-0600 (Reapproved 0305)
SEMI E64-0600 (technical revision)
SEMI E64-0698 (technical revision)
SEMI E64-0298 (technical revision)
SEMI E64-0997 (first published)
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