SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at and in May 2012; originally published in 1997; previously published November 2005.


NOTICE: This Document was reapproved with minor editorial changes.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This Specification defines a standard location on SEMI E15.1-compliant tools and requirements to be used for installing a docking interface for carrier transport carts. It is intended to promote a consistent interface location between carrier transport carts and SEMI E15.1-compliant wafer process or inspection equipment.


This Standard covers 300 mm SEMI E15.1-compliant tools only. Similar requirements for other tools are not defined here.


Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port

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