SEMI E66 - Test Method for Determining Particle Contribution by Mass Flow Controllers
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in May 2017; originally published September 1997; previously published June 2011.
The purpose of this Test Method is to measure particle contribution by mass flow controllers (MFCs) intended for use in high-purity gas systems.
This Document describes a test method that yields statistically significant comparisons of particle contribution among mass flow controllers under test conditions.
This Test Method defines a procedure for testing MFCs intended for installation into a high-purity gas systems. It is intended for use by manufacturers and end users.
Referenced SEMI Standards
SEMI E29 — Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components