SEMI E67 - Test Method for Determining Reliability of Mass Flow Controller
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in February 2018; originally published September 1997; previously published October 2011.
This Document describes a method to help determine the ability of a mass flow controller (MFC) to meet the manufacturer’s published specifications over its life time. The results of the test will also be useful in the comparison of MFCs.
This procedure applies to MFCs used in semiconductor gas systems.
Referenced SEMI Standards
SEMI C59 — Specification for Nitrogen
SEMI E17 — Guide for Mass Flow Controller Transient Characteristics Tests
SEMI E66 — Test Method for Determining Particle Contribution by Mass Flow Controllers
SEMI E69 — Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components