SEMI E68 - Test Method for Determining Warm-Up Time of Mass Flow Controllers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

The purpose of this method is to provide a standardized method for quantifying the warm-up time of a mass flow controller (MFC).


The test conditions in this method are intended to simulate bench top warm-up, with an MFC that has been equalized to ambient conditions for 24 hours before the application of power.

 

Referenced SEMI Standards

None.

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