SEMI E68 - Test Method for Determining Warm-Up Time of Mass Flow Controllers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this method is to provide a standardized method for quantifying the warm-up time of a mass flow controller (MFC).

 

The test conditions in this method are intended to simulate bench top warm-up, with an MFC that has been equalized to ambient conditions for 24 hours before the application of power.

 

Referenced SEMI Standards

None.

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