SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This Standard specifies the physical and electrical interfaces for dry pump (DRP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps. This Document is also used by semiconductor processing equipment suppliers to specify standardized interfaces to pump suppliers.

This Standard applies to vacuum pumps supplied with 300 mm semiconductor processing equipment.


The Standard specifies the mechanical and electrical interfaces for dry pumps including the following.

• Mechanical connectors

• Control signals and connector

• Power supply and connector


Figure 1 shows the scope of the standardized interface.


Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

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