SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps
This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2012. Available at www.semiviews.org and www.semi.org in April 2013; originally published June 1998; previously published March 2007.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Standard specifies the physical and electrical interfaces for dry pump (DRP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps. This Document is also used by semiconductor processing equipment suppliers to specify standardized interfaces to pump suppliers.
This Standard applies to vacuum pumps supplied with 300 mm semiconductor processing equipment.
The Standard specifies the mechanical and electrical interfaces for dry pumps including the following.
• Mechanical connectors
• Control signals and connector
• Power supply and connector
Referenced SEMI Standards
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment