SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps. This Document is also used by semiconductor processing equipment suppliers to specify standardized interfaces to pump suppliers.

This Standard applies to vacuum pumps supplied with 300 mm semiconductor processing equipment.

The Standard specifies the mechanical and electrical interfaces for TMPs, including the following:

·    Mechanical connectors and locations

·    Control signals and connector

·    Power supply and connector

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

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