SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015; originally published in 1998; previously published July 2010.
The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC.
This procedure describes a method to determine the MFC conversion factor and function between two gases.
This Document provides a common basis for communication between manufacturers and users.
The intent of this Document is not to suggest any specific testing program, but to specify the test method to be used when testing for parameters covered by this method. Reference operating conditions represent the environmental conditions where the ‘best’ performance can be expected.
Referenced SEMI Standards