SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases -

Abstract

The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC.

This procedure describes a method to determine the MFC conversion factor and function between two gases.

This Standard provides a common basis for communication between manufacturers and users.

The intent of this Standard is not to suggest any specific testing program, but to specify the test method to be used when testing for parameters covered by this Test Method. Reference operating conditions represent the environmental conditions where the ‘best’ performance can be expected.

Referenced SEMI Standards (purchase separately)

None.

Revision History

SEMI E77-0423 (technical revision)

SEMI E77-1104 (Reapproved 0815)

SEMI E77-1104 (Reapproved 0710)

SEMI E77-1104 (technical revision)

SEMI E77-0998 (first published)

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