SEMI E79 - Specification for Definition and Measurement of Equipment Productivity -

Abstract

This Specification provides metrics for measuring equipment productivity of manufacturing equipment in the semiconductor and related industries.

This Specification defines metrics and calculations for measurement of equipment productivity, including overall equipment efficiency (OEE).

Referenced SEMI Standards (purchase separately)

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

SEMI E116 — Specification for Equipment Performance Tracking

Revision History

SEMI E79-0221 (technical revision)

SEMI E79-0814E (editorial revision)

SEMI E79-0814 (complete rewrite)

SEMI E79-1106 (technical revision)

SEMI E79-0304 (technical revision)

SEMI E79-0200 (technical revision)

SEMI E79-0299 (first published)

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