SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) -

Abstract

The purpose of this Test Method is to provide a standardized method for quantifying the effect of mounting attitude on a mass flow controller (MFC).

This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects.

This Standard describes a method to determine the effect of attitude (mounting position) of a MFC on flow span and zero.

The intent of this Standard is not to suggest any specific testing program but to specify the test method to be used when testing for parameters covered by this Test Method. Reference operating conditions represent the environmental conditions where the ‘best’ performance can be expected.

The minimum test described in this Standard is to test one MFC in five common mounting positions using Nitrogen gas at 135.8 kPa (19.7 psia) and 308 kPa (44.7 psia). This Test Method can be used to evaluate additional gases, pressures, or mounting attitudes.

Referenced SEMI Standards (purchase separately)

None.

Revision History

SEMI E80-0423 (technical revision)

SEMI E80-0299 (Reapproved 0915)

SEMI E80-0299 (Reapproved 0710)

SEMI E80-0299 (Reapproved 1104)

SEMI E80-0299 (first published)

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