SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in September 2015; originally published in 1999; previously published July 2010.
NOTICE: This Document was reapproved with minor editorial changes.
The purpose of this Test Method is to provide a standardized method for quantifying the effect of mounting attitude on a mass flow controller (MFC).
This Document provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects.
This procedure describes a method to determine the effect of attitude (mounting position) of a MFC on flow span and zero.
The intent of this Document is not to suggest any specific testing program but to specify the test method to be used when testing for parameters covered by this method. Reference operating conditions represent the environmental conditions where the ‘best’ performance can be expected.
The minimum test described in this Document is to test one MFC in five common mounting positions using Nitrogen gas at 135.8 kPa (19.7 psia) and 308 kPa (44.7 psia). This Test Method can be used to evaluate additional gases, pressures or mounting attitudes.
Referenced SEMI Standards