SEMI E81 - Provisional Specification for CIM Framework Domain Architecture -

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Non-Member Price: $170.00

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E81-0600 (Reapproved 0307) - Inactive



This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at in February 2007. Originally published June 1999; previously published June 2000.


This document is an overview of the structure and contents of a suite of documents representing an application framework for the Computer Integrated Manufacturing (CIM) systems as used in semiconductor factories. A framework is a software infrastructure that creates a common environment for integrating applications and sharing information in a given domain. The purpose of this framework is to establish an industry standard architecture for complex manufacturing systems, leading to an open, multi-supplier CIM system environment. The framework described in this specification is called the CIM Framework.


Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E32 — Material Movement Management (MMM), SEMI E42 -- Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E86 — Provisional Specification for CIM Framework Factory Labor Component
SEMI E93 — Provisional Specification for CIM Framework Advanced Process Control Component
SEMI E96 — Guide for CIM Framework Technical Architecture
SEMI E97 — Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces
SEMI E102 — Provisional Specification for CIM Framework Material Transport and Storage Component

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