SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) -

Abstract

This Standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of IBSEM equipment into an automated (e.g., semiconductor fabrication and flat panel display) factory. This Document accomplishes this by defining an operational model for IBSEM equipment as viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional activity that are within the scope of this Standard: traffic management characteristics (queuing), parallel interface for carrier transfer (SEMI E23), transport system controller architecture, and delivery of the transfer unit.

The scope of this Standard is limited to the usage and description of interbay and intrabay AMHS transport equipment (OHT, OHS, RGT, AGT, DWC) as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 13). It defines the view of the equipment through the SECS communication link. It does not define the internal operation of the equipment. It includes a specific transfer command state model and transport system controller state model as the basis for all equipment of this class.

This Standard assumes that the GEM fundamental requirements and selected additional capabilities (as specified in § 13) have been implemented on the IBSEM equipment. It expands the GEM standard requirements and capabilities in the areas of state models (TSC, transfer command, vehicle and carrier state models), collection events, alarm documentation, remote commands, data item variables, and material movement.

Referenced SEMI Standards (purchase separately)

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E32 — Material Movement Management (MMM)

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

Revision History

SEMI E82-1106 (Reapproved 0523)

SEMI E82-1106 (Reapproved 0523)

SEMI E82-1106 (technical revision)

SEMI E82-0706 (technical revision)

SEMI E82-1105 (technical revision)

SEMI E82-0705 (technical revision)

SEMI E82-0305 (technical revision)

SEMI E82-1104 (technical revision)

SEMI E82-0704 (technical revision)

SEMI E82-0304 (technical revision)

SEMI E82-1103 (technical revision)

SEMI E82-0703 (technical revision)

SEMI E82-1102 (technical revision)

SEMI E82-0302 (technical revision)

SEMI E82-1101 (technical revision)

SEMI E82-0701 (technical revision)

SEMI E82-0301 (technical revision)

SEMI E82-0999 (first published)

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