SEMI E83 - Specification for PGV Mechanical Docking Flange
This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 5, 2015. Available at www.semiviews.org and www.semi.org in May 2015; originally published June 1999; previously published July 2014.
This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port.
This Specification defines a mechanical standard for the stationary (equipment) side of the docking flange used by PGVs. This flange is to be mounted to the floor within the volume defined by the equipment loadport standards. These standards include, but are not limited to: SEMI E64 volume at SEMI E15.1 and SEMI G82 load ports (for 300 mm) and SEMI E154 (for 450 mm wafer carriers).
Referenced SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI E154 — Mechanical Interface Specification for 450 mm Load Port
SEMI G82 — Provisional Specification for 300 mm Load Port for Frame Cassettes in Backend Process
SEMI G95 — Mechanical Interface Specification for 450 mm Load Port for Tape Frame Cassettes in the Backend Process
SEMI E162 — Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port