SEMI E83 - Specification for PGV Mechanical Docking Flange -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port.

This Specification defines a mechanical standard for the stationary (equipment) side of the docking flange used by PGVs. This flange is to be mounted to the floor within the volume defined by the equipment loadport standards. These standards include, but are not limited to: SEMI E64 volume at SEMI E15.1 and SEMI G82 load ports (for 300 mm) and SEMI E154 (for 450 mm wafer carriers).

 

Referenced SEMI Standards (purchase separately)

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI G82 — Provisional Specification for 300 mm Load Port for Frame Cassettes in Backend Process

SEMI G95 — Mechanical Interface Specification for 450 mm Load Port for Tape Frame Cassettes in the Backend Process

SEMI E162 — Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port

 

Revision History

SEMI E83-0515 (technical revision)

SEMI E83-0714 (technical revision)

SEMI E83-0413 (technical revision)

SEMI E83-1106 (technical revision)

SEMI E83-1000 (technical revision)

SEMI E83-0699 (first published)

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