SEMI E87 - Specification for Carrier Management (CMS) -

Abstract

* This Standard has the option to purchase the Current document with a Redline document (Current + Redline). The Redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the Redline document and the Current document, the Current version is the official and authoritative version.

1  Purpose
1.1  This Specification provides a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.
2  Scope
2.1  This Specification covers host and equipment communication for SEMI E15.1, 300 mm load ports.
2.2  This Specification defines standards that facilitate the host’s knowledge and role in automated and manual carrier transfers, as well as internal buffer equipment carrier transfers. Specifically, this Specification provides state models and scenarios that define the host interaction with the equipment for the following:
• Carrier transfer between automated material handling system (AMHS) vehicles and production equipment load ports.
• Carrier transfers to/from production equipment internal buffer space.
• Equipment and load port access mode switching.
• Carrier to load port association.
• CarrierID verification and Carrier slot map verification.

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Subordinate Standards (included)
SEMI E87.1 — Specification for SECS-II Protocol for Carrier Management (CMS)

Referenced SEMI Standards (purchase separately)
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for SECS-II Protocol for Object Services (OSS)
SEMI E40 — Specification for Processing Management
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management
SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)

Revision History
SEMI E87-0225 (technical revision)
SEMI E87-0524 (technical revision)
SEMI E87-0324 (technical revision)
SEMI E87-1023 (technical revision)
SEMI E87-0921 (technical revision)
SEMI E87-0619E (editorial revision)
SEMI E87-0619 (technical revision)
SEMI E87-0718 (technical revision)
SEMI E87-1017 (designation update)
SEMI E87-0312 (technical revision)
SEMI E87-0709 (technical revision)
SEMI E87-0707 (technical revision)
SEMI E87-0706E2 (editorial revision)
SEMI E87-0706E (editorial revision)
SEMI E87-0706 (technical revision)
SEMI E87-1105 (technical revision)
SEMI E87-0705 (technical revision)
SEMI E87-0304 (technical revision)
SEMI E87-0703 (technical revision)
SEMI E87-0303 (technical revision)
SEMI E87-0702 (technical revision)
SEMI E87-0302 (technical revision)
SEMI E87-1101 (technical revision)
SEMI E87-0701 (technical revision)
SEMI E87-0301 (technical revision)
SEMI E87-1000 (technical revision)
SEMI E87-0600 (technical revision)
SEMI E87-0200 (technical revision)
SEMI E87-0999 (first published)

SEMI E87.1-0225 (technical revision)
SEMI E87.1-0524 (technical revision)
SEMI E87.1-0324 (technical revision)
SEMI E87.1-1023 (technical revision)
SEMI E87.1-0921 (technical revision)
SEMI E87.1-0619E (editorial revision)
SEMI E87.1-1017 (technical revision)
SEMI E87.1-0707 (technical revision)
SEMI E87.1-1105 (technical revision)
SEMI E87.1-0702 (technical revision)
SEMI E87.1-0302 (technical revision)
SEMI E87.1-1101 (technical revision)
SEMI E87.1-0701 (technical revision)
SEMI E87.1-0301 (technical revision)
SEMI E87.1-1000 (technical revision)
SEMI E87.1-0200 (first published)

Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.