SEMI E90 - 基板トラッキングの仕様

Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Information & Control Committeeで技術的に承認されている。現版は2007425日,global Audits and Reviews Subcommitteeにて発行が承認された。201111月に およびwww.semi.orgで入手可能となる。初版は19999月発行,前版は20077月に発行された。

注意: SEMI E90は,SEMI E90.1の改訂に伴い,1111出版サイクルで更新された。SEMI E90には変更はない。


Subordinate Document:

SEMI E90.1-1111 - SECS-プロトコル基板トラッキングのための仕様

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)

SEMI E53 — Event Reporting

SEMI E87 — Specification for Carrier Management (CMS)

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