E09000 - SEMI E90 - Specification for Substrate Tracking

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

NOTICE: The designation of SEMI E90 was updated during the 0921 publishing cycle to reflect the reapproval of SEMI E90.1.

The purpose of this Specification is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This Specification defines the concepts and behaviors for the information management of substrates, as well as the messages/services.

Essentially, information about substrates must be managed by the factory system, while the equipment is required to provide the services for the substrate information management. This Specification addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.

The scope of this Specification is to define the information services of equipment that can be requested by the user. To clarify required services, the concepts and behaviors of the substrate, the substrate location, the batch, and the batch location are defined.

This Specification is applicable to any manufacturing equipment that handles substrates. To implement these services, the equipment and factory system must be integrated by means of a communication link.

Subordinate Standard (included):

SEMI E90.1-0312 (Reapproved 0921) - Specification for SECS-II Protocol Substrate Tracking

Referenced SEMI Standards (purchase separately)

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services

Revision History

SEMI E90-0921 (designation update)

SEMI E90-0312 (Reapproved 1218)

SEMI E90-0312 (technical revision)

SEMI E90-1111 (designation update)

SEMI E90-0707 (technical revision)

SEMI E90-0706 (technical revision)

SEMI E90-0306 (technical revision)

SEMI E90-1105 (technical revision)

SEMI E90-0705 (technical revision)

SEMI E90-1104E2 (editorial revision)

SEMI E90-1104E (editorial revision)

SEMI E90-1104 (technical revision)

SEMI E90-0304 (technical revision)

SEMI E90-0703 (technical revision)

SEMI E90-0303 (technical revision)

SEMI E90-1102 (technical revision)

SEMI E90-0702 (technical revision)

SEMI E90-0302 (technical revision)

SEMI E90-1101 (technical revision)

SEMI E90-0701 (technical revision)

SEMI E90-0301 (technical revision)

SEMI E90-1000 (technical revision)

SEMI E90-0600 (technical revision)

SEMI E90-0200 (technical revision)

SEMI E90-0999 (first published)

SEMI E90.1-0312 (Reapproved 0921)

SEMI E90.1-0312 (technical revision)

SEMI E90.1-1111 (technical revision)

SEMI E90.1-0706 (technical revision)

SEMI E90.1-0705 (technical revision)

SEMI E90.1-1104 (technical revision)

SEMI E90.1-0703 (technical revision)

SEMI E90.1-0303 (technical revision)

SEMI E90.1-1102 (technical revision)

SEMI E90.1-0702 (technical revision)

SEMI E90.1-0701 (technical revision)

SEMI E90.1-0301 (first published)

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