SEMI E90.1 - Specification for SECS-II Protocol Substrate Tracking -

Abstract

NOTICE: By purchasing this download, you will receive the Primary Standard, SEMI E190 and the Subordinate Standard, SEMI E90.1. By purchasing this download, you do not need to purchase the SEMI E90 download.

1  Purpose
1.1  This Specification maps the services and data of SEMI E90 to SECS-II streams and functions, and data definitions.
2  Scope
2.1  This Specification covers equipment supporting automated substrate tracking.
2.2  This Specification applies to all implementations of SEMI E90 that use the SECS-II message protocol (SEMI E5). Compliance to this Standard requires compliance to both SEMI E90 and SEMI E5.

Primary Standard (included)
SEMI E90 — Specification for Substrate Tracking

Referenced SEMI Standards (purchase separately)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39.1 — Specification for SECS-II Protocol for Object Services (OSS)

Revision History
SEMI E90-1224 (technical revision)
SEMI E90-0624 (technical revision)
SEMI E90-0921 (designation update)
SEMI E90-0312 (Reapproved 1218)
SEMI E90-0312 (technical revision)
SEMI E90-1111 (designation update)
SEMI E90-0707 (technical revision)
SEMI E90-0706 (technical revision)
SEMI E90-0306 (technical revision)
SEMI E90-1105 (technical revision)
SEMI E90-0705 (technical revision)
SEMI E90-1104E2 (editorial revision)
SEMI E90-1104E (editorial revision)
SEMI E90-1104 (technical revision)
SEMI E90-0304 (technical revision)
SEMI E90-0703 (technical revision)
SEMI E90-0303 (technical revision)
SEMI E90-1102 (technical revision)
SEMI E90-0702 (technical revision)
SEMI E90-0302 (technical revision)
SEMI E90-1101 (technical revision)
SEMI E90-0701 (technical revision)
SEMI E90-0301 (technical revision)
SEMI E90-1000 (technical revision)
SEMI E90-0600 (technical revision)
SEMI E90-0200 (technical revision)
SEMI E90-0999 (first published)

SEMI E90.1-1224 (technical revision)
SEMI E90.1-0624 (technical revision)
SEMI E90.1-0312 (Reapproved 0921)
SEMI E90.1-0312 (technical revision)
SEMI E90.1-1111 (technical revision)
SEMI E90.1-0706 (technical revision)
SEMI E90.1-0705 (technical revision)
SEMI E90.1-1104 (technical revision)
SEMI E90.1-0703 (technical revision)
SEMI E90.1-0303 (technical revision)
SEMI E90.1-1102 (technical revision)
SEMI E90.1-0702 (technical revision)
SEMI E90.1-0701 (technical revision)
SEMI E90.1-0301 (first published)

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