SEMI E91 - Specification for Prober Specific Equipment Model (PSEM) -

Abstract

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1 Purpose

1.1 This Document establishes a Specific Equipment Model for prober equipment (PSEM). The PSEM consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented in addition to the fundamental requirements and additional capabilities specified in SEMI E30 (GEM). The intent of this Document is to facilitate the integration of prober equipment into an automated semiconductor factory. This Document accomplishes this by defining an operational model for prober equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior.

2 Scope

2.1 The scope of this Document is limited to the definition of prober equipment behavior as perceived by a Semiconductor Equipment Communications Standard (SECS-II) (SEMI E5) host that complies with GEM. The Document defines the view of the equipment through the SECS communications link, but does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class.

2.2 This Document requires that the GEM fundamental requirements and applicable additional capabilities have been implemented on the prober equipment. This Document expands GEM Standard requirements and capabilities in the areas of the processing state model, collection events, remote commands, variable data items and process program management, and adds Prober Job state model to GEM Standard requirements and capabilities. This Document does not include the definition of the treatment of Multiple Stage.

2.3 This Document applies to the class of prober equipment in which the wafer is unloaded from the same slot in the same carrier which loaded the wafer after processing.

Referenced SEMI Standards

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI M20 — Practice for Establishing a Wafer Coordinate System

SEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array

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