SEMI E92 - Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (Bolts/Light) -

Abstract

This Standard is intended to provide an appropriate level of specification that ensures modularity and interchangeability at all mechanical interfaces between the component that opens the boxes and presents the boxes to the equipment wafer handler for unloading and loading 300 mm wafers (BOLTS/Light unit) and higher level part of equipment.

This Standard is also intended to ensure a high level of interchangeability and interoperability by setting additional specifications for some of the box opener/loader’s functions that affect interoperability (refer to Figure 1).

By setting specification for both the mechanical interface and functions of Box opener/loader, this Standard is intended to achieve

• High level of interchangeability/interoperability,
• Quick attachment/detachment capability with high mechanical repeatability,
• Light weight, and
• Compactness.

Items Specified — This Standard is intended to set an appropriate level of specification that are necessary for while ensuring modularity, interchangeability, and interoperability, including:

• Mechanical interface features between the box opener/loader and equipment
• Box opener/loader functions that affect interoperability.

Usage of This Standard — Interoperability specifications defined by this Standard are intended to be used as interfaces and functionality between BOLTS/Light compliant box opener/loader and:

• A BOLTS-M compliant load port unit (that would conform to SEMI E63).
• An integrated load port such as four box opener/loader in one chassis.
• High-densely packaged equipment that uses the space under the box opener/loader.

SEMI Standards Compatibility — This Standard is compatible with 300 mm SEMI Standards including SEMI E15.1, SEMI E47.1, SEMI E1.9, SEMI E62, SEMI E63, and SEMI E64.

Open Cassette Application — The BOLTS/Light unit can be configured to handle boxes that would conform to SEMI E47.1 and SEMI E62.

A similar unit without the box opening function may be compatibly designed to facilitate placement of an open cassette (e.g., a cassette that conforms to SEMI E1.9).

Carrier Capacities — This Standard defines one interface for 13 or 25 carrier capacity box opener/loader.

The interface specified in this Standard is designed for equipment with a sealed minienvironment, but it is not limited to such.

Referenced SEMI Standards (purchase separately)

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

Revision History

SEMI E92-0523 (technical revision)

SEMI E92-0302E (Reapproved 0615)

SEMI E92-0302E (Reapproved 0709)

SEMI E92-0302E (editorial revision)

SEMI E92-0302 (technical revision)

SEMI E92-0200E (editorial revision)

SEMI E92-0200 (technical revision)

SEMI E92-0999 (first published)

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