SEMI E92 - Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (Bolts/Light)

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 10, 2015. Available at www.semiviews.org and www.semi.org in June 2015; originally published in 1999; previously published July 2009.

 

Provide Standard for Box Opener/Loader Interoperability — This Standard is intended to provide standard specifications such as interfaces between the component that opens the boxes and presents the boxes to the equipment wafer handler for unloading and loading 300 mm wafers (BOLTS/Light unit) and higher level part of equipment and its functions to provide (see Figure 1):

  • High level of interchangeability/interoperability,
  • Quick attachment/detachment capability with high mechanical repeatability,
  • Light weight, and
  • Compactness.

 

In order to provide a high level of interchangeability and interoperability, this Standard specifies not only interfaces but also some of the box opener/loader’s functions that affect interoperability.

 

Usage of This Standard — Interoperability specifications defined by this Standard are intended to be used as interfaces and functionality between BOLTS/Light compliant box opener/loader and:

  • A BOLTS-M compliant loadport unit (that would conform to SEMI E63).
  • An integrated loadport such as four box opener/loader in one chassis.
  • High-densely packaged equipment that uses the space under the box opener/loader.

 

SEMI Standards Compatibility — This Standard is compatible with 300 mm SEMI Standards including SEMI E15.1, SEMI E47.1, SEMI E1.9, SEMI E62, SEMI E63 and SEMI E64.

 

Open Cassette Application — The BOLTS/Light unit might be configured to handle boxes that would conform to SEMI E47.1 and SEMI E62.

 

A similar unit may be compatibly designed which does not have box opener capability, but facilitates placement of an open cassette (that would conform to SEMI E1.9).

 

Carrier Capacities — This Standard defines one interface for 13 or 25 carrier capacity box opener/loaders.

 

The interface specified in this Standard is designed for equipment with a sealed minienvironment, but it is not limited to such.

 

Items Specified — This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity, interchangeability, and interoperability including:

  • Box opener/loader functions that affect interoperability.
  • Mechanical interface features between the box opener/loader and equipment.

 

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E63 — Provisional Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

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