E09400 - SEMI E94 - コントロールジョブ管理(CJM)の仕様

Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,the Information & Control Global Technical Committeeで技術的に承認されている。現版は201364日,global Audits and Reviews Subcommitteeにて発行が承認された。20137月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は20002月発行。前版は20123月発行。




この仕様はSEMI E30GEM)に適合する装置に適用できる。


Subordinate Document:

SEMI E94.1-0312 - Specification for SECS-II Protocol for Control Job Management (CJM)


Referenced SEMI Standards

SEMI E5—SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E30— Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39.1— SECS-II Protocol for Object Services Standard (OSS)
SEMI E40— Standard for Processing Management

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