SEMI E94 - 컨트롤 잡 관리 사양
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in March 2014; originally published February 2000; previously published July 2013.
This Specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment.
This Specification may be applied to equipment that is compliant to SEMI E30 (GEM).
Referenced SEMI Standards
SEMI E5—SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E30— Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39.1— SECS-II Protocol for Object Services Standard (OSS)
SEMI E40— Standard for Processing Management
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