SEMI E94 - Specification for Control Job Management -

Abstract

This Specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment.

This Specification may be applied to equipment that is compliant to SEMI E30 (GEM).

Subordinate Standards (included)
SEMI E94.1 — Specification for SECS-II Protocol for Control Job Management (CJM)

Referenced SEMI Standards (purchase separately)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)

Revision History
SEMI E94-0324 (technical revision)
SEMI E94-0314 (technical revision)
SEMI E94-0713 (technical revision)
SEMI E94-0312 (technical revision)
SEMI E94-0309 (technical revision)
SEMI E94-1108 (technical revision)
SEMI E94-0308 (technical revision)
SEMI E94-1107 (technical revision)
SEMI E94-1106 (technical revision)
SEMI E94-0306 (technical revision)
SEMI E94-0705 (technical revision)
SEMI E94-1104 (technical revision)
SEMI E94-0702 (technical revision)
SEMI E94-0302 (technical revision)
SEMI E94-1101 (technical revision)
SEMI E94-0701 (technical revision)
SEMI E94-1000 (technical revision)
SEMI E94-0200 (first published)

SEMI E94.1-0312 (Reapproved 0324)
SEMI E94.1-0312 (technical revision)
SEMI E94.1-1107 (technical revision)
SEMI E94.1-1104 (technical revision)
SEMI E94.1-1101 (first published)

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