E09700 - SEMI E97 - Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Originally published February 2000.


This document defines the global declarations used by all other components of the CIM Framework and also specifies the common architecture patterns that serve to functionally integrate CIM Framework components. The material architecture defines functionality common to product management, durables management and consumables management components. The factory resource architecture defines relationships and common functionality of a variety of factory resources. The job architecture defines a factory-wide model for controlling factory jobs that drive a variety of manufacturing tasks. These specifications are separated into a distinct group to enable them to be specified once and then logically included or inherited wherever they are subsequently needed.


Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E81 — Provisional Specification for CIM Framework Domain

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