SEMI E99 - キャリアIDリーダ/ライタ機能スタンダード:コンセプト,挙動,およびサービスに関する仕様

Volume(s): Equipment Automation Hardware / Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,Global Information and Control Committeeで技術的に承認されている。現版は2010521日,Global Audits and Reviews Subcommitteeにて発行が承認された。20106月にwww.semi.orgで入手可能となる。初版は20002月発行,前版は200411月発行。










Subordinate Document:

SEMI E99.1-1104 (Reapproved 0710) - CIMフレームワークマテリアル搬送・格納コンポーネントに関する暫定仕様



Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Specification for Carrier Management (CMS)

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