SEMI E99 - Specification for Carrier ID Reader/Writer

Volume(s): Equipment Automation Hardware / Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published February 2000; previously published July 2010.

 

The purpose of the Carrier ID Reader/Writer Functional Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader/Writer to an upstream controller. A standard interface will increase interchangeability of Carrier ID Reader/Writers so that users and equipment suppliers have a wider range of choices.

 

The Carrier ID Reader/Writer Interface Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller.<br>This Specification includes required behavior and required communications for both a Carrier ID Reader and a Carrier ID Reader/Writer.<br>This Specification does not require, define, or prohibit asynchronous messages sent by the Carrier ID Reader or Reader/Writer.

 

Subordinate Standard

SEMI E99.1-0317 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer

 

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Specification for Carrier Management (CMS)

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