SEMI E99 - Specification for Carrier ID Reader/Writer -

Abstract

The purpose of this Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader/Writer to an upstream controller. A standard interface will increase interchangeability of Carrier ID Reader/Writers so that users and equipment suppliers have a wider range of choices.

This Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller.

This Standard includes required behavior and required communications for both a Carrier ID Reader and a Carrier ID Reader/Writer.

This Standard does not require, define, or prohibit asynchronous messages sent by the Carrier ID Reader or Reader/Writer.

Subordinate Standards (included)

SEMI E99.1 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer

Referenced SEMI Standards (purchase separately)

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services

SEMI E47.1 —Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers

SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E87 — Specification for Carrier Management (CMS)

Revision History

SEMI E99-0623 (technical revision)

SEMI E99-0317 (technical revision)

SEMI E99-1104E (Reapproved 0710)

SEMI E99-1104E (editorial revision)

SEMI E99-1104 (designation update)

SEMI E99-1103 (designation update)

SEMI E99-0303 (technical revision)

SEMI E99-1000E (editorial revision)

SEMI E99-1000 (technical revision)

SEMI E99-0600 (technical revision)

SEMI E99-0200A (technical revision)

SEMI E99-0200 (first published)

SEMI E99.1-0623 (technical revision)

SEMI E99.1-0317 (technical revision)

SEMI E99.1-1104 (Reapproved 0710)

SEMI E99.1-1104 (technical revision)

SEMI E99.1-1103 (technical revision)

SEMI E99.1-0303 (technical revision)

SEMI E99.1-0600E (editorial revision)

SEMI E99.1-0600 (first published)

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