E10000 - SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles

Volume(s): Equipment Automation Hardware / Microlithography
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

This Standard specifies the Reticle SMIF Pod (RSP) used to transport and store 6 inch or 230 mm reticles in a reticle (photomask) or integrated circuit (IC) manufacturing facility.


This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and inter-changeability at all mechanical interfaces. Most of the requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the physical interfaces for the RSP are specified; no materials requirements or micro-contamination limits are given in this Specification.

 

The pellicle exclusion volumes of this Specification accommodate pellicles which extend the full length of the reticles. The pellicle exclusion volume widths are limited to 151 mm for 230 mm reticles, and 129 mm for 6 inch reticles.

 

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)

SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)

SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

SEMI P5 — Specification for Pellicles

 

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