SEMI E101 - Guide for EFEM Functional Structure Model

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at in June 2010. Originally published February 2000; previously published November 2004.


Productivity improvement is the task with the highest priority in semiconductor factories of the 300 mm generation, and computer-integrated manufacturing or factory automation (CIM/FA) technologies become more and more important to accomplish it. The standardization of these technologies is also necessary to provide the CIM/FA infrastructure in a short period of time at a low cost. Since the standards will have to cover a wide range of production equipment, communication hardware, and software tools, it is very important that the standards have a high degree of compatibility. In order to improve the compatibility, this guide provides a functional structure model of an Equipment Front End Module (EFEM) that handles carriers and substrates at the interface between the factory material handling system and the process equipment. The major purposes of this guide are as follows: (1) provide a common understanding of functions of EFEM (Equipment Front End Module) and associated interfaces between functional elements (components with particular function roles), (2) provide a common understanding of the hierarchical structure of functions and their interfaces in an EFEM, (3) provide a common understanding of possible units used for maintenance, adjustment, and control, and (4) provide a map between EFEM functional elements and existing standards.


Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface

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