SEMI E103 - Mechanical Specification for a 300 mm Single-wafer Box System that Emulates a FOUP

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published June 2000; previously published July 2004.

 

NOTICE: This document was balloted and approved for withdrawal in 2010.

 

This standard specifies the carrier side of the mechanical interface between load ports (or buffers) with FIMS interfaces on process or metrology equipment and a system that includes a box that holds only one wafer (such as a test wafer) and that fits onto an adapter mechanism called a single-wafer interface (SWIF). This system appears to the equipment to be a 300 mm FOUP (except that only the volume around the middle wafer may be accessible).

 

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E47.1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers

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