E10500 - SEMI E105 - Provisional Specification for CIM Framework Scheduling Component

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This specification was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the Japanese Regional Standards Committee on February 1, 2001. Initially available at www.semi.org April 2001; to be published July 2001. Originally published October 2000.


The Scheduling Component supports Factory Operations, Material Transport and Storage, Production Machine, and Equipment Tracking and Maintenance components by ordering, in time, jobs that process material on equipment, move material, and maintain equipment. The scheduler uses knowledge of product demand, equipment and material state, process flows, throughput bottlenecks, operational policy and constraints, and other information to recommend jobs that maximize effective utilization of factory resources to satisfy product demand and planned objectives. Increased control over operations requires an active Scheduling Component that can respond to factory events and changes in state and dynamically adjust the schedules for material processing, material transport and equipment maintenance. The Scheduling Component can react to inventory levels of material in the factory to adjust priorities to minimize queue sizes and ensure that use of bottleneck equipment is opti-mized to keep WIP inventory levels at desired levels. The Scheduling Component can minimize turn around time (TAT) by coordinating material transport (for substrates and durables) with processing to reduce equipment idle time. The Scheduling Component can sequence activities to minimize setup time. It can also respond to scheduled and unscheduled equipment down-time to minimize impact on turn around time. In addition to minimizing overall TAT, it can react to the priorities for urgent lots to move them through the process flow in the minimum possible time while adjusting the schedules of lower-priority lots that are impacted.


Referenced SEMI Standards

SEMI E81 — Provisional Specification for CIM Framework Domain Architecture

SEMI E97 — Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces

SEMI E102 — Provisional Specification for CIM Framework Material Transport and Storage Component

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