SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 21, 2010. Available at www.semi.org in June 2010; originally published March 2001; previously published November 2001.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
The objective of this Document is standardization of the specific data format passed from the test equipment to the Yield Management System. The Yield Management System is a kind of data server for detail test data and geometrical defect data of patterns on a wafer as described in the Terminology section of this Document.
This Document assumes a Yield Management System in which test equipment electrical failure information is managed and analyzed in an integrated manner. Examples of test equipment failure information include bit map data, bin data, and inspection information obtained by devices such as wafer inspection equipment and review tools. Standardization of the data file format helps to reduce the development burden on customers and related vendors.
This Document specifies the data file format for transferring from test equipment to a Yield Management System.
This Document is an extension of the general map data item standard; that is, SEMI G81, and the general map data format document, currently under development. This Document does not redefine the general specification.
The scope of this Document is just defining data items and their formats. Data file creation methods, data creating environments and file naming conventions are outside of the scope of this Document. Also, communication protocols to transfer the data are beyond the scope of this Document.
Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)
SEMI G81 — Specification for Map Data Items
SEMI G85 — Specification for Map Data Format