SEMI E108 - Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography/Mass Spectroscopy

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

The purpose of this Standard is to define a test method for the determination of the outgassing organic contamination from minienvironments used for storage and transport of wafers using gas chromatography/mass spectroscopy (GC/MS).

 

This Test Method is intended as an alternative to SEMI E46. The main difference between SEMI E46 and this Document is that SEMI E46 defines a test method which is based on ion mobility spectroscopy (IMS) as the measurement technique while this Standard is based on GC/MS in combination with thermal desorption. Additionally, this Test Method provides a procedure for testing the outgassing of organic compounds in a complete minienvironment. The results of SEMI E46 and this Document are given in different units.


The test method provided in this Document is applicable to the assessment of the outgassing of organic contamination from minienvironments.

 

GC/MS is chosen as the method to determine organic contamination because it is commonly used for characterization and quantification of organic compounds. In combination with thermal desorption, it provides a method for the identification of organic compounds in the atmosphere (i.e., inside the minienvironment) as well as directly from source materials, and transferred contaminants. This method can also be used to evaluate materials and processes used in semiconductor industry.

 

This Test Method is based on ASTM F1982.

  

Referenced SEMI Standards

SEMI E46 — Test Method for the Determination of Organic Contamination from Minienvironments

SEMI F21 — Classification of Airborne Molecular Contaminant Levels in Clean Environments

 

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