SEMI E109 - Specification for Reticle and Pod Management (RPMS) -

Abstract

This Specification provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles within the equipment, identification and verification of both reticle pods and reticles, inspection and qualification of reticles, and other relevant information such as tracking reticle usage.

This Standard covers host and equipment communication for equipment that handles reticles. This only includes equipment that handles reticles both in and outside of a reticle pod.

This Specification defines standards that facilitate the host’s knowledge and role in automated and manual reticle pod transfers, reticle transfers to and from the reticle pod, internal reticle movement, identification, and verification of ReticleID, inspection and qualification of reticles, and tracking reticle usage. Specifically, this Specification provides state models and scenarios that define the host interaction with the equipment for the following:

• Reticle pod transfer between AMHS vehicles and production equipment, bare reticle stockers, and reticle inspection equipment reticle load ports.
• Reticle transfers to/from lithography production equipment internal reticle library space.
• Equipment and reticle load port access mode switching.
• Reticle Pod to load port association.
• Reticle Pod ID verification and Reticle Pod slot map verification.

Subordinate Standards (included)

SEMI E109.1-1110 (Reapproved 0623) — Specification for SECS-II Protocol for Reticle and Pod Management (RPMS)

Referenced SEMI Standards (purchase separately)

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concept, Behavior, and Services

SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface

Revision History

SEMI E109-1017 (Reapproved 0623)

SEMI E109-1017 (technical revision)

SEMI E109-1110 (designation update)

SEMI E109-0305 (technical revision)

SEMI E109-1104 (technical revision)

SEMI E109-0704 (technical revision)

SEMI E109-0703 (technical revision)

SEMI E109-1102 (technical revision)

SEMI E109-0302 (technical revision)

SEMI E109-0701 (first published)

SEMI E109.1-1110 (Reapproved 0623)

SEMI E109.1-1110 (technical revision)

SEMI E109.1-0704 (technical revision)

SEMI E109.1-0703 (technical revision)

SEMI E109.1-1102 (technical revision)

SEMI E109.1-0302 (first published)

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