SEMI E109 - Specification for Reticle and Pod Management (RPMS)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semi.org in October 2017; originally published July 2001; previously published November 2010.

 

This Document provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles within the equipment, identification and verification of both reticle pods and reticles, inspection and qualification of reticles, and other relevant information such as tracking reticle usage.

 

This is a Standard that covers host and equipment communication for equipment that handles reticles. This only includes equipment that handles reticles both in and outside of a reticle pod.

 

The scope of this Document is to define standards that facilitate the host’s knowledge and role in automated and manual reticle pod transfers, reticle transfers to and from the reticle pod, internal reticle movement, identification and verification of ReticleID, inspection and qualification of reticles, and tracking reticle usage. Specifically, this Document provides state models and scenarios that define the host interaction with the equipment for the following:

•Reticle pod transfer between AMHS vehicles and production equipment, bare reticle stockers, and reticle inspection equipment reticle load ports.

•Reticle transfers to/from lithography production equipment internal reticle library space.

•Equipment and reticle load port access mode switching.

•Reticle Pod to load port association.

•Reticle Pod ID verification and Reticle Pod slot map verification.

 

Subordinate Standard:

SEMI E109.1-1110 - Specification for SECS-II Protocol for Reticle and Pod Management (RPMS)

 

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concept, Behavior, and Services
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E99 — Specification for Carrier ID Reader/Writer
SEMI E100 — Specification for a Reticle Smif Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles

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