SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2009. It was available at in June 2009. Originally published November 2001; previously published November 2002.


This guideline defines the zones and volumes in which load port status indicators and load port operation switches should be placed. The purpose of this guideline is to give a similarity in the placement of them on a 300 mm load port. This guideline only defines the zones and volumes for them and the exact placement of them within these zone and volumes are at the direction of the load port suppliers. The zones or volumes may be defined more precisely by standardization improvement on load port design and good unification of load port operation among device manufactures. This guideline may be improved to be a specification after this effort.


Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E47.1 — Provisional Mechanical Specifications for Boxes and Pods Used to Transport and Store 300mm Wafers

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

SEMI E87 — Provisional Specification for Carrier Management (CMS)

SEMI E101 — Provisional Guide for EFEM Functional Structure Model

Member Price: $113.00
Regular price Non-Member Price: $150.00