SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

This guideline defines the zones and volumes in which load port status indicators and load port operation switches should be placed. The purpose of this guideline is to give a similarity in the placement of them on a 300 mm load port. This guideline only defines the zones and volumes for them and the exact placement of them within these zone and volumes are at the direction of the load port suppliers.

 

The zones or volumes may be defined more precisely by standardization improvement on load port design and good unification of load port operation among device manufactures. This guideline may be improved to be a specification after this effort.


This guideline defines following recommended specifications for 300 mm load port.

• Indicator placement zone in which load port status indicators should be placed.

• Switch placement volume in which load port operation switch should be placed.

 

This guideline covers the specifications for both fixed buffer equipment and internal buffer equipment.

 

This guideline is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the physical interfaces for the load port are specified; no materials requirements, micro-contamination limits, use of or logic associated with the defined physical features are given in this Specification.

  

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E101 — Guide for EFEM Functional Structure Model

 

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