SEMI E112 - Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given in this specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the physical interfaces for the MRSP150 are specified; no materials requirements or micro-contamination limits are given in this Specification.

The pellicle exclusion volumes of this Specification accommodate pellicles which extend the full length of the reticle and up to a maximum pellicle width of 124 mm.

Referenced SEMI Standards (purchase separately)
SEMI E19.3 — Specification for 150 mm (6 inch) Port for Standard Mechanical Interface (SMIF)
SEMI E111 — Specification for a 150mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle

Revision History
SEMI E112-1017 (technical revision)
SEMI E112-0117 (technical revision)
SEMI E112-1213 (technical revision)
SEMI E112-1106 (technical revision)
SEMI E112-0305 (technical revision)
SEMI E112-1104 (technical revision)
SEMI E112-0304 (technical revision)
SEMI E112-0303 (technical revision)
SEMI E112-0302 (technical revision)
SEMI E112-1101 (first published)

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