SEMI E112 - Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles -

Abstract

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in October 2017; originally published November 2001; previously published January 2017.

　

This Standard specifies the 150 mm Multiple Reticle SMIF Pod (MRSP150) used to transport and store six 6 inch reticles in an integrated circuit (IC) manufacturing facility.

 

This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given in this specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the physical interfaces for the MRSP150 are specified; no materials requirements or micro-contamination limits are given in this Specification.

　

The pellicle exclusion volumes of this Specification accommodate pellicles which extend the full length of the reticle and up to a maximum pellicle width of 124　mm.

　

The MRSP150 has the following components, subcomponents, and other features. A ‘●’ symbol indicates components or features which are required and a ‘◊’ symbol indicates components or features which are optional.

• Top

• robotic handling flange

• Interior

• supports for six 6 inch reticles
• reticle capture
• reticle contact surfaces
• end-effector exclusion volumes
• 2 safety rail exclusion volumes
• pellicle exclusion volumes
• lateral constraints
• reticle backstop

• Sides

• 2 side handling flanges on the sides parallel to the bilateral reference plane

• 2 side handling exclusion volumes
• RFID placement zone

• Bottom

• door compatible with SMIF as defined in SEMI E19.3
• pod latch-pin holes
• 2 conveyor rails on the sides parallel to the bilateral reference plane

　

Referenced SEMI Standards

SEMI E19.3 — Specification for 150 mm (6 inch) Port for Standard Mechanical Interface (SMIF)
SEMI E30.1 — Specification for Inspection and Review Specific Equipment Model (ISEM)
SEMI E47.1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers
SEMI E111 — Specification for a 150mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle
SEMI P5 — Specification for Pellicles

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