SEMI E114 - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

This standard was technically approved by the global Metrics Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on January 2, 2009. It was available at www.semi.org in February 2009. Originally published June 2002.

 

E This document was editorially modified in May 2002. A change was made to ¶ 1.1.

 

The purpose of this document is to define a test method used to determine the electrical length, power losses, and characteristic impedance variation of RF cable assemblies used in RF power delivery systems for semiconductor processing equipment.

 

Referenced SEMI Standards

SEMI E113 — Specification for Semiconductor Processing Equipment RF Power Delivery Systems

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