SEMI E116 - Specification for Equipment Performance Tracking -

Abstract

This Standard provides specification for implementing basic equipment performance tracking (EPT) for production equipment. Provisions in this Standard enable the host computer to track basic equipment performance in an automated and consistent matter, without operator or host input. This Standard provides specification for equipment suppliers to:

• Track basic equipment states (no operator or host input required).
• Track basic equipment states in a modular manner, for both major modules and the overall equipment.
• Report basic equipment state changes to a host computer, at both module and equipment level.
• Report equipment’s time in state to a host computer, at both module and equipment level.
• Report reasons to a host computer for why equipment is blocked from performing its task, at both module and equipment level.

Equipment users require the ability to track equipment performance without dependence on user input to eliminate inaccuracies due to incorrect or untimely input from the user. The ability to track equipment performance without user input is essential in 300 mm wafer factories where operational scenarios require minimal manual interaction. EPT defines concepts, behavior, and message services that enable the host computer to obtain the equipment data required for equipment performance tracking in an automated and consistent matter without operator or host input.

EPT enables factory managers to identify the current states of factory equipment, both at the equipment level and at the module level (e.g., processing chambers), without dependence on user input. EPT enables factory engineers to evaluate the time that equipment and modules spent in different states and identify areas for improvement. EPT enables factory engineers to obtain directly from the equipment the reasons why the equipment or module is prevented from performing. EPT provides industrial engineers the equipment data which, when combined with external data from the Manufacturing Execution System (MES), will enable accurate calculation of SEMI E10 states and SEMI E79 metrics at the equipment-level and the module-level. EPT enables automation engineers to develop reusable host interfaces by using a standardized collection event and data variables to collect equipment state data.

The Scope of this Standard is to define equipment behavior states and the data required to track basic equipment performance for production equipment. These requirements are intended to facilitate equipment-level and module-level state tracking and to communicate state information to the host for simple equipment performance tracking, without requiring host or operator input.

Specifically, this Standard provides:

• An EPT state model that defines triggers for state changes.
• Specification of data variables required to communicate basic equipment performance data to the host computer.
• Specification of event messages used to communicate basic equipment performance data to the host computer.
• Requirements for EPT compliance.

This Standard specifies the concepts, behavior, and message services that enable the host computer to obtain the equipment data required for equipment performance tracking in an automated and consistent manner, without operator or host input. It does not specify the report of SEMI E10 states from the equipment to a host computer, as this information requires user input and is already specified by SEMI E58.

This Standard does not conflict with SEMI E58 nor does it inhibit the equipment’s ability to report out SEMI E10 states via SEMI E58.

This Standard is a building block towards SEMI E10 and SEMI E79 by providing accurate equipment information required for SEMI E10 and SEMI E79 metrics, without dependence on operator or host input, eliminating inaccuracies due to incorrect or untimely input from the user. EPT assists both SEMI E10 and SEMI E79 by providing a modular approach to equipment performance tracking, allowing the state of the equipment to be determined by the states of its major modules. EPT assists SEMI E79 by providing task-level detail of the equipment or module’s current activity, allowing performance metrics to be tracked at the task level.

Subordinate Standards (included)

SEMI E116.1 — Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)

Referenced SEMI Standards (purchase separately)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E79 — Specification for Definition and Measurement of Equipment Productivity
SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)

Revision History
SEMI E116-0324 (technical revision)
SEMI E116-0623 (technical revision)
SEMI E116-0518 (designation update)
SEMI E116-1017 (technical revision)
SEMI E116-0707E (editorial revision)
SEMI E116-0707 (technical revision)
SEMI E116-0706 (technical revision)
SEMI E116-0306 (technical revision)
SEMI E116-0705 (technical revision)
SEMI E116-0704 (technical revision)
SEMI E116-0304 (technical revision)
SEMI E116-0703 (technical revision)
SEMI E116-0303 (technical revision)
SEMI E116-0702 (first published)

SEMI E116.1-0623 (Reapproved 0324)
SEMI E116.1-0623 (technical revision)
SEMI E116.1-0707 (Reapproved 0518)
SEMI E116.1-0707 (technical revision)
SEMI E116.1-0706 (technical revision)
SEMI E116.1-1104 (technical revision)
SEMI E116.1-0703 (technical revision)
SEMI E116.1-0303 (first published)

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