SEMI E117 - Specification for Reticle Load Port
This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in January 2017; originally published November 2002; previously published August 2016.
This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated RSP transport systems, and/or to meet ergonomic requirements for manually loaded equipment.
This Standard covers only load ports for reticle SMIF pods (RSPs) as specified in SEMI E100, SEMI E111, and SEMI E112. Similar requirements and options covering load ports for wafers are covered in SEMI E15 (for 200 mm wafers and smaller) and in SEMI E15.1 (for 300 mm wafers).
Referenced SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E19.3 — Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port
SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)
SEMI E72 — Specification and Guide for 300 mm Equipment Footprint, Height, and Weight
SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles
SEMI E111 — Mechanical Specification for a 150mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle
SEMI E112 — Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store 6 Inch Reticles