SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念,動作,サービス -

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Non-Member Price: $203.00

Volume(s): Equipment Automation Hardware / Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)
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Revision: SEMI E118-1104E - Inactive



本仕様は,Global Information and Control Committeeにおいて技術的に承認されたものであり,Japan Information and Control Committeeが直接責任を負うものである。現版は2002719日にJapan Regional Standards Committeeにて承認されている。200210月にまずwww.semi.orgで入手可能になり,200211月発行に至る。

E 本スタンダードは20052月に図R2-1に対する編集上の修正が加えられた。


注意:SEMI E118200411月にサブドキュメントSEMI E118.1が改訂されたため改訂年月が更新された。














Subordinate Standard:

SEMI E118.1-1104 - ウェーハIDリーダ通信インタフェーススタンダードのSECS-I,SECS-II プロトコル仕様


Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E15 — Specification for Tool Load Port

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers

SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behaviors, and Services

SEMI E101 — Provisional Guide for EFEM Functional Structure Model

SEMI T7 — Specification for Back Surface Marking of Double-Side Polished Wafers With a Two-Dimensional Matrix Code Symbol

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