SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service

Volume(s): Equipment Automation Hardware / Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This specification was technically approved by the global Information & Control Committee and is the direct responsibility of the Japan Information & Control Committee. Current edition approved by the Japan Regional Standards Committee on July 19, 2002. Initially available at www.semi.org October 2002; to be published November 2002.

 

E This standard was editorially modified in February 2005 to correct errors in Figure R2-1.

 

NOTICE: The designation of SEMI E118 was updated during the 1104 publishing cycle to reflect the creation of SEMI E118.1.

 

The purpose of the Wafer ID Reader Functional Standard is to provide a common specification for concepts, behavior, and services (functions) provided by a Wafer ID Reader to an upstream controller. A standard interface will increase interchange-ability of Wafer ID Readers so that users and equipment suppliers have a wider range of choices.

 

Subordinate Standard:

SEMI E118.1-1104 - Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communicaton Interface Standards

 

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E15 — Specification for Tool Load Port

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers

SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behaviors, and Services

SEMI E101 — Provisional Guide for EFEM Functional Structure Model

SEMI T7 — Specification for Back Surface Marking of Double-Side Polished Wafers With a Two-Dimensional Matrix Code Symbol

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