Volume(s): Equipment Automation Software
Language: Korean
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in April 2014; originally published March 2003; previously published March 2010.

The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment structure and related elements. This object model is intended to be used in the following ways:

  • As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host.

  • As a base model to be used and extended by other SEMI Equipment Communication Standards.

  • As a reference for the creation of technology-specific object model definitions, such as XML schema.

This Specification provides a common set of constructs that can be used by the equipment manufacturer to model their equipment structure and related elements.

This Specification defines the classes, attributes, relationships, and other detail appropriate for the model of an equipments structure as viewed by a factory host application through the available communication interfaces.

The model contained in this Specification documents features of the equipment structure considered necessary for more than one (current or future) Equipment Communication Standards.

Subordinate Document:


Referenced SEMI Standards

SEMI E121 — Guide for Styleand Usage of XML for Semiconductor Manufacturing Applications

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