SEMI E120 - Specification for the Common Equipment Model (CEM) -

Abstract

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1  Purpose
1.1  The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment structure and related elements. This object model is intended to be used in the following ways:
• As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host.
• As a base model to be used and extended by other SEMI Equipment Communication Standards.
• As a reference for the creation of technology-specific object model definitions, such as XML schema.
2  Scope
2.1  This Specification provides a common set of constructs that can be used by the equipment manufacturer to model their equipment structure and related elements.
2.2  This Specification defines the classes, attributes, relationships, and other detail appropriate for the model of an equipment’s structure as viewed by a factory host application through the available communication interfaces.
2.3  The model contained in this Specification documents features of the equipment structure considered necessary for more than one (current or future) Equipment Communication Standards.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Subordinate Standards (included)
SEMI E120.1-0414 — XML Schema for the Common Equipment Model (CEM)
SEMI E120.2-1225 — Specification for Protocol Buffers for Common Equipment Model (CEM)

Referenced SEMI Standards (purchase separately)
None.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI E120-1225 (technical revision)
SEMI E120-0922 (Reapproved 1224)
SEMI E120-0922 (Reapproved 0823)
SEMI E120-0922 (designation update)
SEMI E120-0414 (technical revision)
SEMI E120-0310 (technical revision)
SEMI E120-1108 (technical revision)
SEMI E120-0706 (technical revision)
SEMI E120-0705E (editorial revision)
SEMI E120-1104E (editorial revision)
SEMI E120-0704 (technical revision)
SEMI E120-0304 (technical revision)
SEMI E120-0703 (technical revision)
SEMI E120-0303 (first published)

SEMI E120.1-0414 (technical revision)
SEMI E120.1-0310 (technical revision)
SEMI E120.1-1108 (technical revision)
SEMI E120.1-0706 (technical revision)
SEMI E120.1-0705 (technical revision)
SEMI E120.1-1104 (technical revision)
SEMI E120.1-0704 (first published)

SEMI E120.2-1225 (technical revision)
SEMI E120.2-1224 (technical revision)
SEMI E120.2-0823 (technical revision)
SEMI E120.2-0922 (first published)

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