SEMI E120.2 - Specification for Protocol Buffers for Common Equipment Model (CEM) -

Abstract

NOTICE: By purchasing this download, you will receive the Primary Standard, SEMI E120 and the Subordinate Standard, SEMI E120.2. By purchasing this download, you do not need to purchase the SEMI E120 download.

1  Purpose
1.1  The purpose of this Specification is to provide an implementation mapping of the SEMI E120 Specification for Common Equipment Model to Protocol Buffers.
2  Scope
2.1  The scope of this Specification is the faithful representation of the messages to support SEMI E120 with Protocol Buffers. It will not add new concepts to the SEMI E120 model. The only additions made are those needed to render useful Protocol Buffers messages.
 

Referenced SEMI Standards (purchase separately)
SEMI E120 — Specification for Common Equipment Model (CEM)
SEMI E179 — Specification for Protocol Buffers Common Components

Revision History
SEMI E120-1224 (technical revision)
SEMI E120-0922 (Reapproved 0823)
SEMI E120-0922 (designation update)
SEMI E120-0414 (technical revision)
SEMI E120-0310 (technical revision)
SEMI E120-1108 (technical revision)
SEMI E120-0706 (technical revision)
SEMI E120-0705E (editorial revision)
SEMI E120-1104E (editorial revision)
SEMI E120-0704 (technical revision)
SEMI E120-0304 (technical revision)
SEMI E120-0703 (technical revision)
SEMI E120-0303 (first published)

SEMI E120.1-0414 (technical revision)
SEMI E120.1-0310 (technical revision)
SEMI E120.1-1108 (technical revision)
SEMI E120.1-0706 (technical revision)
SEMI E120.1-0705 (technical revision)
SEMI E120.1-1104 (technical revision)
SEMI E120.1-0704 (first published)

SEMI E120.2-1224 (technical revision)
SEMI E120.2-0823 (technical revision)
SEMI E120.2-0922 (first published)

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