SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications -

Abstract

The inclusion of eXtensible Markup Language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology. This Guide is the first step to prepare for XML protocols in SEMI Standards and to establish consistency in XML style and usage. Recommendations given in this Document are intended for the definition and conformance of XML based standards. This Document also attempts to highlight those areas where standardization and further work may be required.

This Guide is intended to promote interoperable application of XML in a variety of semiconductor manufacturing usage contexts. It addresses an approach for the usage and definition of XML specifications within the semiconductor industry with the focus on the use of XML in future SEMI Standards. These guidelines should be applied to any XML document or schema generated as part of a SEMI Standard for communication between software entities. This Guide includes the following: 

• Overview of XML Resources, Organizations, and Standards, 
• XML Three Tier Model Architecture, 
• and General and specific recommendations of XML style and usage.

Referenced SEMI Standards (purchase separately)

None.

Revision History

SEMI E121-1017 (Reapproved 0423)

SEMI E121-1017 (technical revision)

SEMI E121-0305 (Reapproved 1111)

SEMI E121-0305 (technical revision)

SEMI E121-0304 (technical revision)

SEMI E121-0703 (technical revision)

SEMI E121-0303 (first published)

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