E12100 - SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in October 2017; originally published March 2003; previously published November 2011.


The inclusion of eXtensible Markup Language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology. This Guide is the first step to prepare for XML protocols in SEMI Standards and to establish consistency in XML style and usage. Recommendations given in this Document are intended for the definition and conformance of XML based standards. This Document also attempts to highlight those areas where standardization and further work may be required.


This Guide is intended to promote interoperable application of XML in a variety of semiconductor manufacturing usage contexts. It addresses an approach for the usage and definition of XML specifications within the semiconductor industry with the focus on the use of XML in future SEMI Standards. These guidelines should be applied to any XML document or schema generated as part of a SEMI Standard for communication between software entities. This Guide includes the following:

•Overview of XML Resources, Organizations, and Standards,

•XML Three Tier Model Architecture, and

•General and specific recommendations of XML style and usage.


Referenced SEMI Standards


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