E12200 - SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in February 2017; originally published March 2003; previously published November 2009.

NOTICE: This Standard replaces SEMI E30.3, which has been removed from publication as of the March 2003 (0303) publication cycle.

This Document establishes a Specific Equipment Model for testing equipment (TSEM). The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment. These characteristics and behaviors are required to be implemented. The intent of this Document is to facilitate the integration of testing equipment into an automated semiconductor factory. This Document accomplishes this by defining an operational model for testing equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior.

This Document defines the view of the equipment through the host communications link but does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class.

This Document expands testing equipment requirements and capabilities in the areas of the processing state model, collection events, alarm documentation, remote commands, variable items, and process program management.

Subordinate Standard:

SEMI E122.1-0703 (Reapproved 1109) — Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM)

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

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