SEMI E123 - Specification for Handler Equipment Specific Equipment Model (HSEM) -

Abstract

This Standard establishes a Specific Equipment Model (SEM) for Handling equipment (HSEM). The SEM consists of equipment characteristics and behaviors that are applicable to this class of equipment. The intent of this Standard is to facilitate the integration of Handling equipment into an automated (semiconductor) factory. This Standard accomplishes this by defining an operational model for Handling equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior.

The scope of this Standard is limited to the definition of Handling equipment behavior as perceived by a host. It defines the view of the equipment through the equipment communications interface. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class.

This Standard expands the handler equipment requirements and capabilities in the areas of the processing state model, collection event, alarm documentation, remote commands, variables item, and process program management.

Subordinate Standards (included)

SEMI E123.1-0703 (Reapproved 0623) — Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)

Referenced SEMI Standards (purchase separately)

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

Revision History

SEMI E123-0217 (Reapproved 0623)

SEMI E123-0217 (title change)

SEMI E123-0703 (Reapproved 1109)

SEMI E123-0703 (designation update)

SEMI E123-0303 (first published - replaces SEMI E30.2)

SEMI E123.1-0703 (Reapproved 0623)

SEMI E123.1-0703 (Reapproved 1109)

SEMI E123.1-0703 (first published)

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