SEMI E123 - Specification for Handler Equipment Specific Equipment Model (HSEM)
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in February 2017; originally published March 2003; previously published October 2009.
NOTICE: This Standard replaces SEMI E30.2, which has been removed from publication as of the March 2003 (0303) publication cycle.
This Document establishes a Specific Equipment Model (SEM) for Handling equipment (HSEM). The SEM consists of equipment characteristics and behaviors that are applicable to this class of equipment. The intent of this Document is to facilitate the integration of Handling equipment into an automated (semiconductor) factory. This Document accomplishes this by defining an operational model for Handling equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior.
The scope of this Document is limited to the definition of Handling equipment behavior as perceived by a host. It defines the view of the equipment through the equipment communications interface. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class.
This Document expands the handler equipment requirements and capabilities in the areas of the processing state model, collection event, alarm documentation, remote commands, variables item, and process program management.
SEMI E123.1-0703 (Reapproved 1109) - Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)
Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)