E12500 - SEMI E125 - 装置自己記述(EqSD)の仕様

Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Information & Control Committeeで技術的に承認されている。現版は2010430日,global Audits and Reviews Subcommitteeにて発行が承認された。20106月にwww.semi.orgで入手可能となる。初版は20037月発行,前版は20103月に発行された。


Subordinate Document:

SEMI E125.1-0710 - 装置自己記述(EqSD)のためのSOAPバインディングの仕様

Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concept, Behavior, and Services
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML

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