SEMI E125 - Specification for Equipment Self Description (EqSD) -

Abstract

This Specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and physical equipment configuration available from their equipment. With this information available for consumption by software systems, it can be used as a tool to aid the process of integrating equipment into a factory’s automation system.

This Standard specifies the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment. This Specification only describes information that is static in nature (i.e., information that does not change dynamically while the equipment is running). This Standard also specifies an interface that Clients can use to access this information.

This Specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI Specification for Data Collection Management.

Subordinate Standards (included)

SEMI E125.1 — Specification for SOAP Binding for Equipment Self Description (EQSD)

SEMI E125.2 — Specification for Protocol Buffers for Equipment Self Description (EqSD)

Referenced SEMI Standards (purchase separately)

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Specification for Object Services: Concept, Behavior, and Services

SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E134 — Specification for Data Collection Management

Revision History

SEMI E125-0923 (technical revision)

SEMI E125-1022 (technical revision)

SEMI E125-0414 (technical revision)

SEMI E125-0710 (technical revision)

SEMI E125-0310 (technical revision)

SEMI E125-0709 (technical revision)

SEMI E125-0308 (designation update)

SEMI E125-0307 (technical revision)

SEMI E125-0306 (technical revision)

SEMI E125-1105 (technical revision)

SEMI E125-0305 (designation update)

SEMI E125-1104 (technical revision)

SEMI E125-0704 (technical revision)

SEMI E125-0304 (technical revision)

SEMI E125-0703 (first published)

SEMI E125.1-0414 (technical revision)

SEMI E125.1-0710 (technical revision)

SEMI E125.1-0310 (technical revision)

SEMI E125.1-0709 (technical revision)

SEMI E125.1-0308 (technical revision)

SEMI E125.1-1107 (technical revision)

SEMI E125.1-0307 (technical revision)

SEMI E125.1-1105 (technical revision)

SEMI E125.1-0305 (first published)

SEMI E125.2-0923 (technical revision)

SEMI E125.2-1022 (first published)

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