E12500 - SEMI E125 - Specification for Equipment Self Description (EqSD)
This Specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and physical equipment configuration available from their equipment. With this information available for consumption by software systems, it can be used as a tool to aid the process of integrating equipment into a factory's automation system.
This Standard specifies the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment. This Specification only describes information that is static in nature (i.e., information that does not change dynamically while the equipment is running). This Standard also specifies an interface that Client Sessions can use to access this information.
This Specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI Specification for Data Collection Management.
This Specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration, interfaces, and available data, and keeping this information current.
The details of any underlying concepts and behavioral models (e.g., carrier management, process/control job, etc.) that can be described by metadata are to be separately specified in a document dedicated to those concepts. Only the ability to describe the fact that a supplier has implemented such a concept and that a Client Session can discover this implementation and any data it can produce is in scope for this Specification.
This Specification does not require that the metadata provided by the equipment be directly human readable. It is expected that applications will be written to organize and present this information to human users in a form that is easier for end users to digest.
Subordinate Standards (included)
SEMI E125.1-0414 — Specification for Soap Binding for Equipment Self Description (EqSD)
Referenced SEMI Standards (purchase separately)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concept, Behavior, and Services
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management
SEMI E125-0414 (technical revision)
SEMI E125-0710 (technical revision)
SEMI E125-0310 (technical revision)
SEMI E125-0709 (technical revision)
SEMI E125-0308 (designation update)
SEMI E125-0307 (technical revision)
SEMI E125-0306 (technical revision)
SEMI E125-1105 (technical revision)
SEMI E125-0305 (designation update)
SEMI E125-1104 (technical revision)
SEMI E125-0704 (technical revision)
SEMI E125-0304 (technical revision)
SEMI E125-0703 (first published)
SEMI E125.1-0414 (technical revision)
SEMI E125.1-0710 (technical revision)
SEMI E125.1-0310 (technical revision)
SEMI E125.1-0709 (technical revision)
SEMI E125.1-0308 (technical revision)
SEMI E125.1-1107 (technical revision)
SEMI E125.1-0307 (technical revision)
SEMI E125.1-1105 (technical revision)
SEMI E125.1-0305 (first published)
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