SEMI E125 - Specification for Equipment Self Description (EqSD)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at and in April 2014; originally published July 2003; previously published July 2010.


This Specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and physical equipment configuration available from their equipment. With this information available for consumption by software systems, it can be used as a tool to aid the process of integrating equipment into a factory’s automation system.


This Document specifies the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment. The specification only describes information that is static in nature (i.e., information that does not change dynamically while the equipment is running). This Document also specifies an interface that clients can use to access this information.


This Specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI Specification for Data Collection Management.


Out of Scope

This Specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration, interfaces, and available data, and keeping this information current.


The details of any underlying concepts and behavioral models (e.g., carrier management, process/control job, etc.) that can be described by metadata are to be separately specified in a document dedicated to those concepts. Only the ability to describe the fact that a supplier has implemented such a concept and that a client can discover this implementation and any data it can produce is in scope for this Specification.


This Specification does not require that the metadata provided by the equipment be directly human readable. It is expected that applications will be written to organize and present this information to human users in a form that is easier for end users to digest.


Subordinate Document:

SEMI E125.1-0414 - Specification for SOAP Binding for Equipment Self Description (EQSD)


Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 —Object Services Standard: Concept, Behavior, and Services
SEMI E120—Specification for the Common Equipment Model (CEM)
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML

Member Price: $113.00
Regular price Non-Member Price: $150.00