SEMI E130 - 300mm環境のプローバ専用装置モデル(PSEM300)に関する仕様 -

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Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)
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Revision: SEMI E130-1104 (Reapproved 0710) - Superseded



本スタンダードは,global Information & Control Committee技術的に承認されている。現版は2010430日,Global Audits and Reviews Subcommitteeにて発行が承認された。20106月にwww.semi.orgで入手可能となる。初版は200311月発行,前版は200411月発行。




Subordinate Document:

SEMI E130.1-1104 (Reapproved 0710) - 300mm環境のプローバ専用装置モデル(PSEM300)のSECS-IIプロトコル仕様


Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High Speed SECS Message Services (HSMS) Generic Services
SEMI E40 — Standard for Processing Management
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management
SEMI G81 — Specification for Map Data Items
SEMI G85 — Specification for Map Data Format
SEMI M20 — Specification for Establishing a Wafer Coordinate System
SEMI M21 — Specification for Assigning Addresses to Rectangular Elements in a Cartesian Array

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