SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) -

Abstract

This Standard establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this Standard is to facilitate the integration of prober equipment into an automated semiconductor factory. This Standard accomplishes this by defining an operational model for prober equipment as viewed by a host. This definition provides a standard host interface and equipment operational behavior.

The PSEM300 extends the generic Process State Model of SEMI E30 (GEM) with a Specific Process State model for prober equipment. This Standard attempts to be protocol independent. There is no attempt to replace the protocol dependent aspects of SEMI E30 (GEM). Instead, this Standard assumes that certain equipment features not covered within the concepts and behaviors of the related 300 mm Standards will be supported using the concepts and behaviors defined within SEMI E30. Refer to § 9 for a description of the SEMI E30 provisions.

This Standard does not attempt to define the full set of equipment capabilities. It is understood that additional value-added features will be provided in addition to the requirements set forth in this Standard.

This Standard intends host-instructed indexing of sites within a substrate and the loading/unloading of the substrates. Automated self-indexing with such communications as GPIB or RS-232C between tester and prober equipment is outside the scope of this Specification but is not precluded. Refer to Related Information 2 for reference.

This Standard does not describe much about recovery of exception or manual operation to recover from alarm/potential-alarm (warning) situations. Such conditions are usually configuration specific.

This Standard presents a solution from the concepts and behavior down to the messaging services. It does not define the messaging protocol.

Subordinate Standards (included)

SEMI E130.1 — Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)

Referenced SEMI Standards (purchase separately)

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E40 — Specification for Processing Management

SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E94 — Specification for Control Job Management

SEMI G81 — Specification for Map Data Items

SEMI G85 — Specification for Map Data Format

Revision History

SEMI E130-0618 (Reapproved 0723)

SEMI E130-0618 (designation update)

SEMI E130-1017 (technical revision)

SEMI E130-1104 (Reapproved 0710)

SEMI E130-1104 (designation update)

SEMI E130-1103 (first published)

SEMI E130.1-1104 (Reapproved 0723)

SEMI E130.1-1104 (Reapproved 0618)

SEMI E130.1-1104 (Reapproved 0710)

SEMI E130.1-1104 (first published)

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