E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in October 2017; originally published November 2003; previously published July 2010.


NOTICE: The designation of SEMI E130 was updated during the 0618 publishing cycle to reflect the revision of SEMI E130.1.


This Document establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this Document is to facilitate the integration of prober equipment into an automated semiconductor factory. This Document accomplishes this by defining an operational model for prober equipment as viewed by a host. This definition provides a standard host interface and equipment operational behavior.


The PSEM300 extends the generic Process State Model of SEMI E30 (GEM) with a Specific Process State model for prober equipment. This Standard attempts to be protocol independent. There is no attempt to replace the protocol dependent aspects of SEMI E30 (GEM). Instead, this Document assumes that certain equipment features not covered within the concepts and behaviors of the related 300 mm Standards will be supported using the concepts and behaviors defined within SEMI E30. See § 9 for a description of the SEMI E30 provisions.


This Document does not attempt to define the full set of equipment capabilities. It is understood that additional value-added features will be provided in addition to the requirements set forth in this Document.


This Document intends host-instructed indexing of sites within a substrate and the loading/unloading of the substrates. Automated self-indexing with such communications as GPIB or RS-232C between tester and prober equipment is outside the scope of this Specification but is not precluded. See the Related Information section for reference.


This Document does not describe much about recovery of exception or manual operation to recover from alarm/potential-alarm (warning) situations. Such conditions are usually configuration specific.


This Standard presents a solution from the concepts and behavior down to the messaging services. It does not define the messaging protocol.


Subordinate Standard:
SEMI E130.1-1104 (Reapproved 0618) - Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)


Referenced SEMI Standards

SEMI E5 — Specification for SEMI Equipment Communication Standard 2 Message Content (SECS II)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management
SEMI G81 — Specification for Map Data Items
SEMI G85 — Specification for Map Data Format
SEMI M20 — Specification for Establishing a Wafer Coordinate System
SEMI M21 — Specification for Assigning Addresses to Rectangular Elements in a Cartesian Array

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