SEMI E131 - Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M
NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Document establishes the specification for the interface requirements between an integrated measurement module (IMM) and 300 mm tools using an interface as defined by SEMI E63 (BOLTS-M).
This Standard will permit the tool suppliers, robotics suppliers, and measurement module suppliers, to provide plug-and-play integrated measurement solutions on a mechanical level.
It is the purpose of this Standard to facilitate process monitoring through rapid access to measurement data, to reduce material handling between process and measurement equipment, and to provide the opportunity to increase process monitoring with a minimum or no decrease in throughput.
This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interoperability at all mechanical interfaces. It establishes the mechanical interface specifications for integration of measurement modules intended for, but not limited to, 300 mm process tools using a BOLTS-M interface, while utilizing existing SEMI Standards as much as possible.
This Standard specifies that SEMI E63 is utilized for the tool side of the interface.
Referenced SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E47.1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Carriers
SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI E127 — Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)