SEMI E131 - Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This standard was technically reapproved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 16, 2009. Initially available at in February 2010. Originally published March 2004.


This document establishes the specification for the interface requirements between an integrated measurement module (IMM) and 300 mm tools using an interface as defined by SEMI E63 (BOLTS-M). The standard will permit the tool suppliers, robotics suppliers, and measurement module suppliers, to provide plug and play integrated measurement solutions on a mechanical level. It is the purpose of this standard to facilitate process monitoring through rapid access to measurement data, to reduce material handling between process and measurement equipment, and to provide the opportunity to increase process monitoring with a minimum or no decrease in throughput.


Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Carriers

SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

SEMI E127 — Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

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